A novel gap narrowing process for creating high aspect ratio transduction gaps for MEM HF resonators

Stoffels, SteveSteveStoffelsBryce, GeorgeGeorgeBryceVan Hoof, RitaRitaVan HoofDu Bois, BertBertDu BoisMertens, RobertRobertMertensPuers, BobBobPuersTilmans, HarrieHarrieTilmansWitvrouw, AnnAnnWitvrouw2021-10-182021-10-182009https://imec-publications.be/handle/20.500.12860/16274A novel gap narrowing process for creating high aspect ratio transduction gaps for MEM HF resonatorsProceedings paper