Ramezani, MalihehMalihehRamezaniSeveri, SimoneSimoneSeveriDu Bois, BertBertDu BoisAsafa, TesleemTesleemAsafaRottenberg, XavierXavierRottenbergRochus, VeroniqueVeroniqueRochusTilmans, HarrieHarrieTilmansDe Meyer, KristinKristinDe MeyerWitvrouw, AnnAnnWitvrouw2021-10-212021-10-212013https://imec-publications.be/handle/20.500.12860/22979Fabrication and characterization of a highly doped poly-SiGe NEMS ohmic switchesMeeting abstract