Electron energy barriers between (100)Si and ultrathin stacks of SiO2, Al2O3 , and ZrO2 insulators

Afanas'ev, V. V.V. V.Afanas'evHoussa, MichelMichelHoussaStesmans, AndreAndreStesmansHeyns, MarcMarcHeyns2021-10-142021-10-142001https://imec-publications.be/handle/20.500.12860/5009Electron energy barriers between (100)Si and ultrathin stacks of SiO2, Al2O3 , and ZrO2 insulatorsJournal article