Radiation damages of SiGe devices by electron irradiation and their thermally recovery bahavior

Nakashima, T.T.NakashimaIdemoto, T.T.IdemotoTakakura, K.K.TakakuraTsunoda, I.I.TsunodaYoneoka, M.M.YoneokaOhyama, H.H.OhyamaYoshino, K.K.YoshinoBargallo Gonzalez, MireiaMireiaBargallo GonzalezSimoen, EddyEddySimoenEneman, GeertGeertEnemanClaeys, CorCorClaeys2021-10-182021-10-182010https://imec-publications.be/handle/20.500.12860/17683Radiation damages of SiGe devices by electron irradiation and their thermally recovery bahaviorProceedings paper