Biocompatible and Hermetic Encapsulation of PMUTs: Effects of Parylene F-VT4 and ALD Stacks on Membrane Vibration and Acoustic Performance

Afshari, EsmaeilEsmaeilAfshariHouri, SamerSamerHouriVerplancke, RikRikVerplanckeRochus, VeroniqueVeroniqueRochusCauwe, MaartenMaartenCauweGijsenbergh, PieterPieterGijsenberghde Beeck, Maaike OpMaaike Opde Beeck2025-07-202025-07-202025-JUN 3WOS:001527650200001https://imec-publications.be/handle/20.500.12860/45924Biocompatible and Hermetic Encapsulation of PMUTs: Effects of Parylene F-VT4 and ALD Stacks on Membrane Vibration and Acoustic PerformanceJournal article10.3390/s25134074WOS:001527650200001MICROMACHINED ULTRASONIC TRANSDUCERSARRAYSTECHNOLOGYMEDLINE:40648330