Schleicher, FilipFilipSchleicherBekaert, JoostJoostBekaertThiam, ArameArameThiamDecoster, StefanStefanDecosterBlanc, RomualdRomualdBlancLazzarino, FredericFredericLazzarinoSantaclara, J. GarciaJ. GarciaSantaclaraRispens, G.G.RispensMaslow, M.M.Maslow2022-11-252022-09-082022-11-252022978-1-5106-4987-30277-786XWOS:000844514700004https://imec-publications.be/handle/20.500.12860/40372Tone reversal patterning for advanced technology nodesProceedings paper10.1117/12.2610941978-1-5106-4988-0WOS:000844514700004