Shi, HualiangHualiangShiShamiryan, DenisDenisShamiryande Marneffe, Jean-FrancoisJean-Francoisde MarneffeHuang, HuaiHuaiHuangHo, PaulPaulHoBaklanov, MikhaïlMikhaïlBaklanov2021-10-202021-10-202012https://imec-publications.be/handle/20.500.12860/21499Plasma processing of low-k dielectricsBook chapter