3D nanoprinting of beam shaping micro-optics on VCSEL chips integrated on a laser-written glass interposer

Kyriazis, AthanasiosAthanasiosKyriazisGuessoum, Salah EddineSalah EddineGuessoumMalica, TusharTusharMalicaVirte, MartinMartinVirteVan Erps, JurgenJurgenVan ErpsVan Steenberge, GeertGeertVan Steenberge2025-07-122025-07-122025978-1-5106-8492-80277-786XWOS:001508513400025https://imec-publications.be/handle/20.500.12860/458933D nanoprinting of beam shaping micro-optics on VCSEL chips integrated on a laser-written glass interposerProceedings paper10.1117/12.3041119978-1-5106-8493-5WOS:001508513400025MICROFABRICATION