3D nanoprinting of beam shaping micro-optics on VCSEL chips integrated on a laser-written glass interposer

Kyriazis, AthanasiosAthanasiosKyriazisGuessoum Salah EddineMalica, TusharTusharMalicaVirte, MartinMartinVirteVan Erps, JurgenJurgenVan ErpsVan Steenberge, GeertGeertVan Steenberge2025-07-122025-07-122025978-1-5106-8492-80277-786XWOS:001508513400025https://imec-publications.be/handle/20.500.12860/45893We present a novel method for integrating Vertical Cavity Surface Emitting Lasers (VCSELs) into fused silica glass, combining precise embedding with the direct laser writing of polymer-based micro-optic elements. Custom-shaped cavities for GaAs-based VCSEL arrays (850nm) are formed via femtosecond laser irradiation and chemical etching. An electrical redistribution layer is created using polyimide coating, excimer laser via-drilling, TiW-Cu sputtering, and photolithographic patterning. Micro-optics for beam focusing are designed, fabricated via two-photon polymerization directly on the integrated VCSELs, and characterized.3D nanoprinting of beam shaping micro-optics on VCSEL chips integrated on a laser-written glass interposerProceedings paper10.1117/12.3041119978-1-5106-8493-5WOS:001508513400025MICROFABRICATION