Delamination in BEOL: analysis of interface failure by combined experimental & modeling approaches

Debecker, BjornBjornDebeckerVanstreels, KrisKrisVanstreelsGonzalez, MarioMarioGonzalezVandevelde, BartBartVandevelde2021-10-212021-10-212013https://imec-publications.be/handle/20.500.12860/22233Delamination in BEOL: analysis of interface failure by combined experimental & modeling approachesProceedings paper