Stephenson, RobertRobertStephensonDe Wolf, PeterPeterDe WolfTrenkler, ThomasThomasTrenklerHantschel, ThomasThomasHantschelClarysse, TrudoTrudoClarysseJansen, PhilippePhilippeJansenVandervorst, WilfriedWilfriedVandervorst2021-10-142021-10-142000https://imec-publications.be/handle/20.500.12860/4771Practicalities and limitations of scanning capacitance microscopy for routine integrated circuit characterizationJournal article