Halder, SandipSandipHalderVos, RitaRitaVosWada, MasayukiMasayukiWadaKenis, KarineKarineKenisBearda, TwanTwanBeardaRadovanovic, SandaSandaRadovanovicDighe, PrasannaPrasannaDigheLeunissen, PeterPeterLeunissenMertens, PaulPaulMertens2021-10-172021-10-1720090894-6507https://imec-publications.be/handle/20.500.12860/15423Use of surface haze for evaluation of photoresist residue removal efficiencyJournal article