Edinger, PierrePierreEdingerTakabayashi, Alain YujiAlain YujiTakabayashiErrando-Herranz, CarlosCarlosErrando-HerranzKhan, Muhammad UmarMuhammad UmarKhanSattari, HamedHamedSattariVerheyen, PeterPeterVerheyenBogaerts, WimWimBogaertsQuack, NielsNielsQuackGylfason, Kristinn B.Kristinn B.Gylfason2022-09-212021-11-272022-09-2120210146-9592WOS:000718386600038https://imec-publications.be/handle/20.500.12860/38476Silicon photonic microelectromechanical phase shifters for scalable programmable photonicsJournal article10.1364/OL.436288WOS:000718386600038SWITCHESMEDLINE:34780433