Low-k1 imaging for contacts and lines using immersion ArF

Van Bavel, MiekeMiekeVan BavelHendrickx, EricEricHendrickxWiaux, VincentVincentWiauxVandenberghe, GeertGeertVandenberghe2021-10-162021-10-162005-02https://imec-publications.be/handle/20.500.12860/11345Low-k1 imaging for contacts and lines using immersion ArFJournal article