Smith, S.S.SmithBrockie, N. L.N. L.BrockieMurray, J.J.MurrayWilson, ChrisChrisWilsonHorsfall, A. B.A. B.HorsfallTerry, J. G.J. G.TerryStevenson, J. T. M.J. T. M.StevensonMount, A.A.MountWalton, A. J.A. J.Walton2021-10-182021-10-182010https://imec-publications.be/handle/20.500.12860/18006Fabrication of test structures to monitor stress in SU-8 films used for MEMS applicationsProceedings paper