Vandervorst, WilfriedWilfriedVandervorstBenett, J.J.BenettHuyghebaert, CedricCedricHuyghebaertConard, ThierryThierryConardGondran, C.C.GondranDe Witte, H.H.De Witte2021-10-152021-10-152003https://imec-publications.be/handle/20.500.12860/8318On the reliability of SIMS depth profiles through HfO2-stacksMeeting abstract