Aziz, AhmedAhmedAzizElsayed, MohannadMohannadElsayedAbu Bakr, HassanHassanAbu BakrEl Rifai, JoumanaJoumanaEl RifaiVan der Donck, TomTomVan der DonckCelis, Jean-PierreJean-PierreCelisLeonov, VladimirVladimirLeonovFiorini, PaoloPaoloFioriniSedky, SherifSherifSedky2021-10-182021-10-1820100361-5235https://imec-publications.be/handle/20.500.12860/16684Pulsed laser deposition of bismuth telluride thin films for microelectromechanical systems thermoelectric energy harvestersJournal article10.1007/s11664-009-1047-1