Fluorine in thermal oxides from HF preoxidation surface treatments

Ruzyllo, JerzyJerzyRuzylloRöhr, ErikaErikaRöhrBaeyens, MartienMartienBaeyensMertens, PaulPaulMertensHeyns, MarcMarcHeyns2021-10-142021-10-141999https://imec-publications.be/handle/20.500.12860/3787Fluorine in thermal oxides from HF preoxidation surface treatmentsJournal article