A life-cycle cost (LCC) fab model - interaction between activities in IC manufacturing and their supporting facilities within a fab

Van Hoornick, NausikaaNausikaaVan HoornickVan den Broeck, KristelKristelVan den BroeckVan Hoeymissen, JanJanVan HoeymissenHeyns, MarcMarcHeynsRiedel, WolfgangWolfgangRiedelBraun, ChristianChristianBraun2021-10-152021-10-152004https://imec-publications.be/handle/20.500.12860/9761A life-cycle cost (LCC) fab model - interaction between activities in IC manufacturing and their supporting facilities within a fabJournal article