Ramezani, MalihehMalihehRamezaniSeveri, SimoneSimoneSeveriMoussa, AlainAlainMoussaOsman, HarisHarisOsmanTilmans, HarrieHarrieTilmansDe Meyer, KristinKristinDe Meyer2021-10-222021-10-222015https://imec-publications.be/handle/20.500.12860/25800Contact reliability improvement of a poly-SiGe based nano-relay with titanium nitride coatingProceedings paperhttp://ieeexplore.ieee.org/xpl/articleDetails.jsp?arnumber=7180989