Van Bavel, MiekeMiekeVan BavelHaspeslagh, LucLucHaspeslaghWitvrouw, AnnAnnWitvrouw2021-10-182021-10-182009https://imec-publications.be/handle/20.500.12860/16352Highly reliable micro-mirror arrays: succesful demonstrators of a SiGe above-IC MEMS processJournal articlewww.semiconductorpackagingnews.com/articles/article_14202.shtml