field evaporation behavior of high-k metal gate stack under femtosecond laser pulsing

Gilbert, MatthieuMatthieuGilbertKoelling, SebastianSebastianKoellingKambham, Ajay KumarAjay KumarKambhamVandervorst, WilfriedWilfriedVandervorst2021-10-182021-10-182010https://imec-publications.be/handle/20.500.12860/17150field evaporation behavior of high-k metal gate stack under femtosecond laser pulsingOral presentation