SAQP spacer merge and EUV self-aligned block decomposition at 28nm metal pitch on imec 7nm node

Lee, Jae UkJae UkLeeChoi, Soo HanSoo HanChoiYasser, SheraziSheraziYasserKim, Ryan Ryoung HanRyan Ryoung HanKim2021-10-272021-10-272019https://imec-publications.be/handle/20.500.12860/33389SAQP spacer merge and EUV self-aligned block decomposition at 28nm metal pitch on imec 7nm nodeMeeting abstracthttps://doi.org/10.1117/12.2515216