Barrier and seed layer coverage in 3D structures with different aspect ratios using sputtering and ALD proecesses

Luhn, OleOleLuhnVan Hoof, ChrisChrisVan HoofRuythooren, WouterWouterRuythoorenCelis, Jean-PierreJean-PierreCelis2021-10-172021-10-1720080167-9317https://imec-publications.be/handle/20.500.12860/14079Barrier and seed layer coverage in 3D structures with different aspect ratios using sputtering and ALD proecessesJournal article