On-chip silicon nitride optical phased array as a broadband near-infrared spectrometer

Liu, ZuyangZuyangLiuLe Thomas, NicolasNicolasLe ThomasBaets, RoelRoelBaets2024-04-112023-08-042024-04-112023978-1-5106-5953-70277-786XWOS:001003452000008https://imec-publications.be/handle/20.500.12860/42262On-chip silicon nitride optical phased array as a broadband near-infrared spectrometerProceedings paper10.1117/12.2647270978-1-5106-5954-4WOS:001003452000008