Characterization of ultra thin oxynitrides, a general approach

Brijs, BertBertBrijsDeleu, JeroenJeroenDeleuConard, ThierryThierryConardDe Witte, HildeHildeDe WitteVandervorst, WilfriedWilfriedVandervorstNakajima, K.K.NakajimaKimura, K.K.KimuraGenchev, I.I.GenchevBergmaier, A.A.BergmaierGoergens, I.I.GoergensNeumaier, P.P.NeumaierDollinger, G.G.DollingerDobeli, M.M.Dobeli2021-10-062021-10-061999https://imec-publications.be/handle/20.500.12860/3271Characterization of ultra thin oxynitrides, a general approachOral presentation