Xue, P.P.XuePei, D.D.PeiZheng, H.H.ZhengLi, W.W.LiAfanasiev, ValeriValeriAfanasievBaklanov, MikhaïlMikhaïlBaklanovde Marneffe, Jean-FrancoisJean-Francoisde MarneffeLin, Y.-H.Y.-H.LinFung, H.-S.H.-S.FungChen, C.-C.C.-C.ChenNishi, Y.Y.NishiShohet, J.L.J.L.Shohet2021-10-232021-10-2320160040-6090https://imec-publications.be/handle/20.500.12860/27620The effects of vacuum-ultraviolet radiation on defects in low-k organosilicate glassJournal articlehttp://www.sciencedirect.com/science/article/pii/S0040609016304217