Sharma, RajivRajivSharmaSivaramakrishnan Radhakrishnan, HariharsudanHariharsudanSivaramakrishnan RadhakrishnanRecaman Payo, MariaMariaRecaman PayoPoortmans, JefJefPoortmans2021-10-272021-10-272019https://imec-publications.be/handle/20.500.12860/33983Development and characterization of silicon-rich nitride layers for silicon solar cell passivating contactsProceedings paper10.4229/EUPVSEC20192019-2DV.1.71