Controlling placement error and dimensional variability in templated DSA

Boeckx, CarolienCarolienBoeckxDoise, JanJanDoiseBekaert, JoostJoostBekaertChan, BTBTChanGronheid, RoelRoelGronheidDe Gendt, StefanStefanDe Gendt2021-10-232021-10-232016https://imec-publications.be/handle/20.500.12860/26356Controlling placement error and dimensional variability in templated DSAMeeting abstract