Rimbock, JohannaJohannaRimbockErtl, StefanStefanErtlRamaswamy, PrasannaPrasannaRamaswamyFarrell, AlexAlexFarrellUzun, AliAliUzunPires, MarianaMarianaPiresCorbett, BrainBrainCorbettLoi, RuggeroRuggeroLoiVarga, KsenijaKsenijaVargaOssieur, PeterPeterOssieur2025-04-162025-02-152025-02-182025-04-162024979-8-3503-9037-72687-9700WOS:001340802800132https://imec-publications.be/handle/20.500.12860/45209Advanced Ultrathin Spray Coating Process Technology for Heterogeneous Integration ApplicationsProceedings paper10.1109/ESTC60143.2024.10712128979-8-3503-9036-0WOS:001340802800132