III/V nano ridge structures for optical applications on patterned 300mm silicon substrate

Kunert, BernardetteBernardetteKunertGuo, WeimingWeimingGuoMols, YvesYvesMolsTian, BinBinTianWang, ZhechaoZhechaoWangShi, YutingYutingShiVan Thourhout, DriesDriesVan ThourhoutPantouvaki, MariannaMariannaPantouvakiVan Campenhout, JorisJorisVan CampenhoutLanger, RobertRobertLangerBarla, KathyKathyBarla2021-10-232021-10-2320160003-6951https://imec-publications.be/handle/20.500.12860/26862III/V nano ridge structures for optical applications on patterned 300mm silicon substrateJournal articlehttp://scitation.aip.org/content/aip/journal/apl/109/9/10.1063/1.4961936