Wu, ChenChenWuLi, YunlongYunlongLiBoemmels, JuergenJuergenBoemmelsDe Wolf, IngridIngridDe WolfTokei, ZsoltZsoltTokeiCroes, KristofKristofCroes2021-10-232021-10-232016https://imec-publications.be/handle/20.500.12860/27601New breakdown mechanism investigation: barrier metal penetration induced soft breakdown in low-k dielectricsProceedings paperhttp://ieeexplore.ieee.org/xpl/articleDetails.jsp?tp=&arnumber=7574511