Takeuchi, ShotaroShotaroTakeuchiYang, LijunLijunYangNguyen, DuyDuyNguyenLoo, RogerRogerLooConard, ThierryThierryConardPourtois, GeoffreyGeoffreyPourtoisVandervorst, WilfriedWilfriedVandervorstCaymax, MattyMattyCaymax2021-10-172021-10-172008https://imec-publications.be/handle/20.500.12860/14537Atomic layer doping of phosphorus and arsenic: experimental and atomistic modelingProceedings paper