Maex, KarenKarenMaexKondoh, EiichiEiichiKondohLauwers, AnneAnneLauwersSteegen, AnAnSteegende Potter de ten Broeck, MurielMurielde Potter de ten BroeckBesser, PaulPaulBesserProost, JorisJorisProost2021-10-012021-10-011998https://imec-publications.be/handle/20.500.12860/2750Control and impact of processing ambient during rapid thermal silicidationProceedings paper