Zhao, C.Z.C.Z.ZhaoZhang, J.F.J.F.ZhangGroeseneken, GuidoGuidoGroesenekenDegraeve, RobinRobinDegraeveEllis, J. N.J. N.EllisBeech, C. D.C. D.Beech2021-10-142021-10-142000https://imec-publications.be/handle/20.500.12860/4973Hydrogen induced and plasma charging enhanced positive charge generation in gate oxidesProceedings paper