LCDU optimization of STT-MRAM 50nm pitch MTJ pillars for process window improvement

Pak, MuratMuratPakCrotti, DavideDavideCrottiYasin, FarrukhFarrukhYasinErcken, MoniqueMoniqueErckenHalder, SandipSandipHalderDe Simone, DaniloDaniloDe SimoneVanelderen, PieterPieterVanelderenSouriau, LaurentLaurentSouriauHody, HubertHubertHodyKar, Gouri SankarGouri SankarKar2021-10-272021-10-272019https://imec-publications.be/handle/20.500.12860/33722LCDU optimization of STT-MRAM 50nm pitch MTJ pillars for process window improvementMeeting abstracthttps://doi.org/10.1117/12.2515023