Wang, YanniYanniWangTeugels, LieveLieveTeugelsVandersmissen, KevinKevinVandersmissenDe Gendt, StefanStefanDe GendtKrishnan, SitaramanSitaramanKrishnanStruyf, HerbertHerbertStruyf2021-10-242021-10-242017-10https://imec-publications.be/handle/20.500.12860/29910Effect of deposition methods on material removal rate during nickel CMPProceedings paper