Dam, Van AnhVan AnhDamWouters, DaanDaanWoutersKnoben, WoutWoutKnobenBrongersma, SywertSywertBrongersmavan Schaijk, RobRobvan Schaijk2021-10-222021-10-222014https://imec-publications.be/handle/20.500.12860/23694Polymer coated MEMS resonator for room temperature NH3 sensingProceedings paperhttps://ieeexplore.ieee.org/document/6984966