Transition from anomalous kinetics toward Fickian diffusion for Si dissolution into amorphous Ge

Balogh, Z.Z.BaloghErdelyi, Z.Z.ErdelyiBeke, D.L.D.L.BekeLanger, G.G.LangerCsik, A.A.CsikBoyen, H.G.H.G.BoyenWiedwald, U.U.WiedwaldZiemann, P.P.ZiemannPortavoce, A.A.PortavoceGirardeaux, C.C.Girardeaux2021-10-172021-10-1720080003-6951https://imec-publications.be/handle/20.500.12860/13335Transition from anomalous kinetics toward Fickian diffusion for Si dissolution into amorphous GeJournal article