Improving mechanical robustness of ultra-low-k SiOCH PECVD glasses by controlled porogen decomposition prior to UV-hardening

Urbanowicz, AdamAdamUrbanowiczVanstreels, KrisKrisVanstreelsVerdonck, PatrickPatrickVerdonckShamiryan, DenisDenisShamiryanDe Gendt, StefanStefanDe GendtBaklanov, MikhaïlMikhaïlBaklanov2021-10-182021-10-1820100021-8979https://imec-publications.be/handle/20.500.12860/18118Improving mechanical robustness of ultra-low-k SiOCH PECVD glasses by controlled porogen decomposition prior to UV-hardeningJournal article