Structural, optical and electrical properties of nanodiamond films deposited by HFCVD on borosilicate glass, fused silica and silicon at low temperature

Remes, Z.Z.RemesAvigal, Y.Y.AvigalKalish, R.R.KalishUzan-Saguy, C.C.Uzan-SaguyChack, A.A.ChackNesladek, MilosMilosNesladek2021-10-152021-10-152004https://imec-publications.be/handle/20.500.12860/9503Structural, optical and electrical properties of nanodiamond films deposited by HFCVD on borosilicate glass, fused silica and silicon at low temperatureJournal article