Feasibility of detecting and imaging deeply buried voids using GHz Half Wavelength Contact Acoustic Microscopy

Quesson, Benoit A. J.Benoit A. J.Quessonvan Willigen, D. M.D. M.van WilligenHorchens, L.L.HorchensGerritsmal, A. M.A. M.GerritsmalBogdanowicz, JanuszJanuszBogdanowiczChen, CongCongChenvan Neer, P. L. M. J.P. L. M. J.van Neer2025-04-032025-04-032024979-8-3503-7191-81099-4734WOS:001428150100013https://imec-publications.be/handle/20.500.12860/45479Feasibility of detecting and imaging deeply buried voids using GHz Half Wavelength Contact Acoustic MicroscopyProceedings paper10.1109/UFFC-JS60046.2024.10793492979-8-3503-7190-1WOS:001428150100013