Marinov, DaniilDaniilMarinovLudwig, JonathanJonathanLudwigChiappe, DanieleDanieleChiappeVoronina, EkaterinaEkaterinaVoroninaRakhimova, TatyanaTatyanaRakhimovade Marneffe, Jean-FrancoisJean-Francoisde MarneffeAsselberghs, IngeIngeAsselberghsDe Gendt, StefanStefanDe Gendt2021-10-252021-10-252018https://imec-publications.be/handle/20.500.12860/31292Dry cleaning and doping of MX2 for contact engineeringMeeting abstracthttps://www2.avs.org/symposium2018/ProgramBooks/ProgramBook_Session_2D+AM+EM+NS-WeM.pdf