The impact of mask birefringence on hyper-NA (NA>1.0) polarized imaging

Geh, BerndBerndGehFlagello, DonisDonisFlagelloProgler, ChrisChrisProglerMartin, PatrickPatrickMartinLeunissen, PeterPeterLeunissenHansen, SteveSteveHansenDe Boeij, WimWimDe Boeij2021-10-162021-10-162005https://imec-publications.be/handle/20.500.12860/10488The impact of mask birefringence on hyper-NA (NA>1.0) polarized imagingProceedings paper