Damage-free contact mode current sensing SPM: benchmarking PFTUNA vs. C-AFM

Celano, UmbertoUmbertoCelanoChintala, Ravi ChandraRavi ChandraChintalaHoflijk, IlseIlseHoflijkMoussa, AlainAlainMoussaVanhaeren, DanielleDanielleVanhaerenMannarino, ManuelManuelMannarinoNazir, AftabAftabNazirEyben, PierrePierreEybenVandervorst, WilfriedWilfriedVandervorst2021-10-212021-10-212013https://imec-publications.be/handle/20.500.12860/22112Damage-free contact mode current sensing SPM: benchmarking PFTUNA vs. C-AFMOral presentation