Everaert, Jean-LucJean-LucEveraertFernandez, LuisLuisFernandezVos, IngridIngridVosVan Ammel, AnnemieAnnemieVan AmmelVrancken, ChristaChristaVranckenDekoster, JohanJohanDekosterBurke, EddEddBurkeVancoille, EricEricVancoille2021-10-212021-10-212013https://imec-publications.be/handle/20.500.12860/22325Tungsten planarization by gas cluster ion beam with CHF3Meeting abstract