Op de Beeck, MaaikeMaaikeOp de BeeckVandenberghe, GeertGeertVandenbergheJaenen, PatrickPatrickJaenenZhang, FenghongFenghongZhangDelvaux, ChristieChristieDelvauxVan Puyenbroeck, IlseIlseVan PuyenbroeckRonse, KurtKurtRonseLamb, J. E.J. E.Lambvan der Hilst, J. B. C.J. B. C.van der Hilst2021-10-012021-10-011998https://imec-publications.be/handle/20.500.12860/2842Optimisation of bottom-ARC processes with respect to CD controlJournal article