B and Ga co-doping in epitaxial SiGe: challenges and opportunities

Porret, ClémentClémentPorretRengo, GianlucaGianlucaRengoHikavyy, AndriyAndriyHikavyyPetersen Barbosa Lima, LucasLucasPetersen Barbosa LimaXie, QiQiXieDouhard, BastienBastienDouhardAyyad, MustafaMustafaAyyadVantomme, AndréAndréVantommeLoo, RogerRogerLoo2021-10-292021-10-292020https://imec-publications.be/handle/20.500.12860/35755B and Ga co-doping in epitaxial SiGe: challenges and opportunitiesMeeting abstracthttps://ecs.confex.com/ecs/prime2020/meetingapp.cgi/Paper/141753