CMOS-compatible surface-micromachined test structure for determination of thermal conductivity of thin film materials based on Seebeck effect

Wang, ZiyangZiyangWangFiorini, PaoloPaoloFioriniVan Hoof, ChrisChrisVan Hoof2021-10-182021-10-182009-01https://imec-publications.be/handle/20.500.12860/16530CMOS-compatible surface-micromachined test structure for determination of thermal conductivity of thin film materials based on Seebeck effectProceedings paper