Isolating the Role of Photoionization for Copolymer Present in Extreme Ultraviolet Photoresists by Gas Phase Electron-Ion Coincidence Experiments

Sajjadian, FaeghehFaeghehSajjadianvon Laffert, ValentinValentinvon LaffertSingh, DhirendraDhirendraSinghGalleni, LauraLauraGalleniPollentier, IvanIvanPollentierRichter, RobertRobertRichtervan Setten, MichielMichielvan SettenDe Gendt, StefanStefanDe GendtConard, ThierryThierryConardHolzmeier, FabianFabianHolzmeier2025-01-202025-01-2020252637-6105WOS:001395925200001https://imec-publications.be/handle/20.500.12860/45099Isolating the Role of Photoionization for Copolymer Present in Extreme Ultraviolet Photoresists by Gas Phase Electron-Ion Coincidence ExperimentsJournal article10.1021/acsapm.4c03223WOS:001395925200001BASIS-SETSPHOTOEMISSION-SPECTROSCOPYCHEMICAL AMPLIFICATIONSECONDARY ELECTRONSENERGYDESIGN