Lisoni, JuditJuditLisoniMaes, DavidDavidMaesEveraert, Jean-LucJean-LucEveraertJohnson, JoJoJohnsonParaschiv, VasileVasileParaschivHaspeslagh, LucLucHaspeslaghWouters, DirkDirkWoutersCasella, PatriziaPatriziaCasellaCorvasce, C.C.CorvasceZambrano, R.R.ZambranoMonchoix, H.H.MonchoixVan Autryve, L.L.Van Autryve2021-10-142021-10-142002https://imec-publications.be/handle/20.500.12860/6544Oxygen barrier for stacked SBT-FeCAP on W-plugMeeting abstract